MIRAI INTEX EXTENDS THE MX SEMI LINEUP OFFERING SUSTAINABLE COOLING FOR SEMICONDUCTOR INDUSTRY

October 29, 2024

MIRAI INTEX presents the extended MX SEMI lineup, groundbreaking multichannel chillers designed for semiconductor manufacturers, specializing in Deep Reactive Ion Etching (DRIE) and Cryogenic Etching. With its revolutionary air cycle technology the MX SEMI delivers unmatched performance, precision, and sustainability, setting new industry standards.

MX SEMI counts two chillers with different motor power, MIRAI XS 20 (20 kW) and MIRAI XS 40 (40 kW).

Key Features:

Sustainable Air Cycle Technology: The MX SEMI uses air as a refrigerant, making it free from harmful chemicals and completely exempt from F-Gas Regulations. With Zero Global Warming Potential (GWP), this chiller offers an environmentally friendly and future-proof solution for businesses looking to minimize their carbon footprint.

Multichannel Design: The MX SEMI is a versatile, multichannel chiller, supports both single and multiple cooling circuits for seamless process integration.

Quick Switching Between Cooling and Heating modes: From +40°C to -100°C - within 2 min

The Widest Temperature Range: With a range from -160°C to +90°C*, the MX SEMI provides industry-leading flexibility for different applications.

Exceptional Precision: With temperature accuracy of ±0.025°C at idle and ±0.5°C under changing loads, it ensures smooth, reliable operation in the most sensitive environments.

Compact and Easy to Install: The narrow, space-efficient design of the MX SEMI, along with its Plug&Play connectivity, ensures a hassle-free installation and integration into your existing setup.

Fast Return on Investment: Minimal maintenance requirements, energy-efficient performance, and reliability ensure cost savings over time, making it a highly profitable investment for businesses.

Desgined for DRIE and Cryogenic Etching Supporting Sustainable Semiconductor Manufacturing
Whether for DRIE, cryogenic etching, or other semiconductor processes, the MX SEMI lineup offers a perfect balance of precision, speed, and environmental responsibility. With its innovative air cycle technology, this system not only boosts operational efficiency but also contributes to sustainable practices.

MIRAI INTEX is proud to announce that our innovative product lineup has been recognized as the Refrigeration Innovation of the Year by the RAC Cooling Industry Awards. This prestigious recognition highlights our commitment to excellence in sustainable cooling technology and industry-leading innovation.

Meet the MIRAI Team at Semicon and Electronica 2024
The MIRAI team will be attending the Semicon exhibition, and we encourage companies involved in DRIE, cryogenic etching, and similar technologies to schedule a meeting with us. Let’s explore how the MX SEMI can revolutionize your operations with its sustainable, high-performance cooling technology.

Contact us today at sales@mirai-intex.com to arrange a meeting at SEMICON EUROPE and learn more about how MIRAI can support your company's growth and sustainability goals.

DOWNLOAD PRODUCT SHEET XS SEMI 20

DOWNLOAD PRODUCT SHEET XS SEMI 40