MIRAI XS 20

MIRAI XS CRYO is a dedicated segment of the MIRAI X CRYO line, specifically engineered to meet the high-precision requirements of the semiconductor industry. This advanced refrigeration system features two fully independent temperature control loops, each equipped with its own high-precision pump, allowing simultaneous management of separate thermal zones with outstanding accuracy and reliability.

TEMPERATURE ACCURACY AND ZERO GWP
The first loop operates in a wide range from –120 °C to +80 °C, while the second loop is designed for +20 °C to +90 °C, with optional extension up to +120 °C upon request. This dual-loop configuration makes the MIRAI XS CRYO exceptionally flexible for complex semiconductor processes requiring different thermal conditions within the same system.

With air as the refrigerant, the system delivers zero Global Warming Potential (GWP) and is not subject to F-Gas regulations, making it 100% environmentally friendly and fully compliant with current and future global sustainability standards.

Temperature stability is a key strength of the MIRAI XS CRYO:
± 0.5 °C under dynamic load conditions
± 0.02 °C once the setpoint is reached

PLUG & PLAY SOLUTION
Thanks to its compact and Plug & Play design, the MIRAI XS CRYO is easy to integrate into new installations and perfectly suited for retrofitting existing systems. It supports standard industrial interfaces, ensuring compatibility across a wide range of semiconductor and high-tech applications.

RAPID AUTOMATIC RESTART
In the event of power outages or voltage fluctuations on the customer’s side, MIRAI systems can automatically restart and restore all operating parameters within 30 seconds—without any operator intervention. This minimizes downtime and ensures uninterrupted production.

HTF LEAK PROTECTION
All MIRAI X CRYO machines are equipped with a comprehensive heat-transfer-fluid (HTF) leak-detection system. Four sensors are strategically positioned at key points: the pump outlet, exchanger inlet, expansion valve, and reservoir. Even a single drop of HTF triggers an immediate alert; in critical cases, the unit will perform an emergency shutdown to prevent damage or contamination.

PARTIAL-LOAD OPERATION
MX SEMI can modulate its capacity to match varying thermal loads. This allows the system to run efficiently and economically, conserving energy without compromising temperature stability. Whether operating at 25 % of maximum capacity during light workloads or ramping up to full power, MX SEMI adjusts automatically to deliver only the cooling or heating required by the process.