MIRAI XS 20

MIRAI XS CRYO is a dedicated segment of the MIRAI X CRYO line, specifically engineered to meet the high-precision requirements of the semiconductor industry. This advanced refrigeration system features two fully independent temperature control loops, each equipped with its own high-precision pump, allowing simultaneous management of separate thermal zones with outstanding accuracy and reliability.

The first loop operates in a wide range from –120 °C to +80 °C, while the second loop is designed for +20 °C to +90 °C, with optional extension up to +120 °C upon request. This dual-loop configuration makes the MIRAI XS CRYO exceptionally flexible for complex semiconductor processes requiring different thermal conditions within the same system.

With air as the refrigerant, the system delivers zero Global Warming Potential (GWP) and is not subject to F-Gas regulations, making it 100% environmentally friendly and fully compliant with current and future global sustainability standards.

Temperature stability is a key strength of the MIRAI XS CRYO:
± 0.5 °C under dynamic load conditions
± 0.02 °C once the setpoint is reached

Thanks to its compact and Plug & Play design, the MIRAI XS CRYO is easy to integrate into new installations and perfectly suited for retrofitting existing systems. It supports standard industrial interfaces, ensuring compatibility across a wide range of semiconductor and high-tech applications.