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MIRAI XS 20

(MXS CRYO 20)
-160°C +90°C
Temperature range
20 kW
Motor power
Features
MX SEMI - IS A SEGMENT LINE OF MIRAI X CRYO LINE, SPECIALLY DESIGNED FOR SEMICONDUCTOR MARKET.
It has 2 loops, allowing it to quickly switch between modes and provide customers with consistent and accurate temperatures.
This advanced refrigeration system is tailored to meet the diverse needs of industries ranging semiconductor manufacturing.

SUSTAINABLE SOLUTION FOR SEMICONDUCTOR PRODUCTION
Complies with all current and future international environmental standards.

QUICK SWITCHING BETWEEN COOLING AND HEATING MODES
From +40°C to -100°C - within 2 min

TEMPERATURE ACCURACY
± 0.5°C under changing load

ZERO GWP
With the air cycle technology
Not a subject of F-Gas Regulation
With the air cycle technology, MIRAI XS is 100% eco-friendly

PLUG & PLAY SOLUTION
The MIRAI XS machine is the ideal solution for retrofitting in existing installation and is easy to implement in new projects due to its Plug & Play design, compatible with multiple industry standard connection types.
Reduced power consumption up to
30%
Eco-Friendly
  • Air or Nitrogen as Refrigerant
  • No need to refilling
  • Environmentally friendly
Temperature accuracy of
0.025°C
Cooling and heating capacity of the MX SEMI 20 in cold and hot loops. At cooling water temperature +10ºC.
MIRAI XS 20 (MXS CRYO 20)
MIRAI XS 20 (MXS CRYO 20)
MIRAI XS 20
Technical Data
Refrigerant
Natural Air
Dimensions (WxDxH) ±1,5 cm
94x136x181 cm
Rated Motor Power
20 kW
Heating
12 kW
Weight
860 kg
Noise Level
75 dB
Operation Cycle
Closed cycle
System Cooling Water
Water-cooled
Temperature Range
from -160℃ to +90℃
Max Rotation Speed
85 000 rpm
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MIRAI XS 20
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MIRAI XS 20